The Biorobotics Lab at MIT is working on tiny industrial robots called Nanowalkers. A new article from Newsfactor has the details. They are about the size of a coin, autonomous, and can move in 3 dimensions with up to 10 million times the precision of current indsutrial robots. They will also be capable of up to 10,000 movements per second. Their initial use would probably be in the pharmaceutical industries.