Hardware

MEMS Inchworm Actuator

Posted 18 Jun 2003 at 16:48 UTC by steve Share This

The June issue of NASA Tech Briefs describes an inchworm-like MEMS device that produces linear motion in precise increments measured in naometers over a range of a few hundred microns. The actuator was developed by E H Yang and uses a combination of piezoelectric drive and electrostatic clamping. There are a lot of potential uses for such a tiny actuator including tiny microsurgical robotics and other precise positioning systems. For technical details and diagrams see the full tech brief (PDF format, free reg. required).

See more of the latest robot news!

Recent blogs

31 Jul 2015 Petar.Kormushev (Master)
24 Jul 2015 mwaibel (Master)
6 May 2015 spirit (Journeyer)
28 Feb 2015 steve (Master)
20 Feb 2015 shimniok (Journeyer)
19 Feb 2015 Flanneltron (Journeyer)
14 Nov 2014 Sergey Popov (Apprentice)
14 Nov 2014 wedesoft (Master)
5 Aug 2014 svo (Master)
3 Jul 2014 jmhenry (Journeyer)
X
Share this page